Course Title and Code

Micro and Nanoscale Devices Laboratory (EE5606)

Programme

UG, PG

Course Credit

0-0-3-2 (Lecture-Tutorial-Practical-Total Credits)

Course Category

Elective

Prerequisite

EE3010/EE5009/EE5510, or any introductory course in semiconductors/devices [with the consent of teacher]

Consent of Teacher

Required for students without the prerequisites

Course Content

S/N Topic No. of Sessions*
1 Review: Basics of Electrical Characterisation of Semiconductor Devices (packaged devices, such as, diodes, MOSFETs, etc.) 01
2 MIS Structures: Cleaning of silicon substrates (RCA clean, piranha clean); Deposition of dielectrics; Metallization (contacts). Electrical characterization: C-V, I-V, Reliability 04
3 Photodetectors and solar cells: Device fabrication (via sol-gel) and characterisation 04
4 Resistive switching devices: Device fabrication (via sol-gel); Electrical characterisation
OR
MEMS cantilever beam: Electrical characterisation		 03

*The duration of one lab session is three hours.

Learning Outcomes

  • Outline basic design and process flow for semiconductor devices for different applications, after identifying the challenges.
  • Outline characterisation techniques necessary to evaluate performance of each device.
  • Thoroughly analyse the characterisation results and extract the necessary device/performance parameters.

Teaching Methodology

Laboratory sessions

Assessment Methods

Lab reports, performance evaluation, oral presentations

Text Books

  • J. Plummer, M. Deal, P. Griffin, “Silicon VLSI Technology: Fundamentals, Practice, and Modeling,” Prentice Hall Electronics and VLSI Series, ISBN-10: 8131726045.
  • E. H. Nicollian and J. R. Brews, “MOS Physics and Technology,” Wiley 2002, ISBN: 978-0-471-43079-7.
  • Y. Taur and T. H. Ning, “Fundamentals of Modern VLSI Devices,” Cambridge University Press, ISBN-13: 9780511601538.
  • Y. Tsividis, “Operation and Modeling of the MOS Transistor,” The Oxford Series in Electrical and Computer Engineering, ISBN-13: 978-0195170153, ISBN-10: 0195170156.
  • B. G. Streetman and S. Banerjee, “Solid State Electronic Devices,” Pearson Education India; Seventh edition (2015), ISBN-10: 9332555087, ISBN-13: 978-9332555082.

References