Course Title and Code
Principles and Design of Micro-Electro-Mechanical Systems (EE5526)
Programme
MTech (Any Semester)
Course Credit
3-0-0-3 (Lecture-Tutorial-Practical-Total Credits)
Course Category
PME
Prerequisite
Undergraduate level electrostatics and mechanics
Consent of Teacher
Yes
Course Content
| S/N | Topic | Lecture (hours) |
|---|---|---|
| 1 | Introduction: Overview of common applications of MEMS devices | 4 |
| 2 | Parallel-plate actuator as a prototypical MEMS device | 3 |
| 3 | Microfabrication Technology: Unit processes, overcoming stiction, process integration | 8 |
| 4 | Statics and Dynamics of microsystems: stress-strain, beam equation, energy method, oscillations | 6 |
| 5 | Microfluidics: Viscous flow, Reynolds number, Couette flow, squeeze film effects | 3 |
| 6 | Actuators: Electrostatic, piezoelectric, and electrothermal actuation | 9 |
| 7 | Sensors: Structure, analysis, and fabrication process flow for various MEMS sensors | 9 |
Learning Outcomes
- Understand the fundamentals, fabrication process, and applications of MEMS.
- Comprehend the basic principles of MEMS sensors and actuators.
- Design a process flow for a basic MEMS device.
Teaching Methodology
Classroom lectures
Assessment Methods
Written examination, continuous assessment
Text Books
- Ki Bang Lee, “Principles of Microelectromechanical Systems,” 1st Edition, Wiley-IEEE Press, ISBN: 978-0-470-46634-6.
- V.K. Aatre, G.K. Ananthasuresh, K.J. Vinoy, S. Gopalakrishnan, K.N. Bhat, “Micro and Smart Systems: Technology and Modeling,” 1st Edition, Wiley India Pvt Ltd, ISBN: 9780470919392.
Reference Books
- Marc J. Madou, “Fundamentals of Microfabrication and Nanotechnology,” 3rd Edition, CRC Press, ISBN: 978-0849331800.
- Stephen D. Senturia, “Microsystem Design,” 2nd Edition, Springer, ISBN: 978-0792372462.
- Mohammad I. Younis, “MEMS Linear and Nonlinear Statics and Dynamics,” Springer 2011 edition, ISBN: 978-1461429128.